Facilities

nanofabrication

NRL members will benefit from the UCSB state-of-art Nanofabrication Facility, and strong internal program in materials research and characterization at UCSB through Materials Research Lab.

ESB Main Cleanroom

Lithography

E-beam Lithography

  • Brand New JEOL 6300FS
  • Resolution to 8nm
  • 20 mn resolution in 500 um x 500 um field

Optical Lithography

  • Holography ≈ 200 nm
  • Projection Stepper ≈ 400 nm resolution; 150 nm registration
  • Contact Lithography (backside capability)

Nanoimprint Lithography

  • Thermal process to 200°C; 600 psi
  • UV curing

Thin Film Deposition

E-beam and Thermal Evaporation

  • Ai, Ti, Al, Au, Ni, Pd, Pt, Ag, Ge, Zn, W, Ta
  • Dielectric: SiO2, SrF, MgO, Ti O2, Ta2O5, SiO
  • Other materials are possible

PECVD

  • SiO2, SiON, Si3N4

Sputtering

  • Si, Co, Ni, Ti, W, Au, Al, ITO, SiO2, SiN, TiO2, AlN, Al2O3
  • Other materials are possible

Dry Etching

CH4, H2, Ar RIE

  • II-VI etching
  • III-V electronic/optoelectronic devices

SF6, CHF3, CF4, O2, Ar RIE/ICP

  • General silicon, oxide, and nitride etch
  • Separate Bosch Si etch Silicon Carbides for MEMS
  • Call about special materials.

BCl3, Cl2, SiCI4, O2 Ar RIE/ICP

  • General semiconductor and metal
  • III-V etching with heated chuck for InP
  • Call about special materials.

Thin Film Characterization

  • SEM
  • FESEM
  • Profilometer
  • Ellipsometer
  • Reflectometer
  • Probe Station with Curve Tracer
  • AFM

Other Processes

  • Contact Annealing
  • Wet Chemical Etching
  • Critical Point Drying
  • Rapid Thermal Annealing
    • 1200°C in N2, H2N2, dry air
    • III-V, Si, other materials
  • Flip-chip Bonding
  • Wafer Bonding to 600°C

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Materials Research Lab

Materials Characterization capabilities include:

  • Atomic Force Microscopy
  • Scanning Electron Microscopy
  • Transmission Electron Microscopy
  • Photoluminescence Spectroscopy
  • X-ray Diffraction
  • Scanning Auger Microscopy